•A 3D micro tactile probe based on piezo-resistive effect is developed for dimensional metrology.•A Nano Measurement Machine (NMM) is presented with the 3D micro tactile probe as a new high precision zero-point indicator.•The experimental results show the standard deviation of 37 nm and 104 nm in the vertical and transverse tactile direction of the 1000.0 μm step-height standard with the tactile probe.A 3D micro tactile probe based on piezo-resistive effect is developed for dimensional metrology and a detailed analysis on the hysteresis, resolution, crosstalk and uncertainty of the probe is presented. A Nano Measurement Machine (NMM) equipped with the 3D micro tactile probe is proposed as a new high precision zero-point indicator for micro- and nano-scale traceable dimensional measurement, which is calibrated according to the standard characteristic curve. In 1 mm step-height standard measurement experiment using the 3D piezo-resistive micro tactile probe, the experimental results show a standard deviation of 37 nm in the vertical tactile direction and one of 104 nm in transverse tactile direction while the standard deviation is 40 nm in the vertical direction in the 2 mm step-height standard measuring experiment.

•A dimension artifact is developed, which is a Cr deposition grating fabricated by laser-focused atomic deposition.•The grating has high accuracy of traceability and can substitute the laser interference technology for instrument calibration.•The grating as a standard in dimension traceability chain short traceability chain and improve practical application.A chromium (Cr) grating pitch standard is fabricated by a technique of laser-focused atomic deposition. Cosine errors of the grating standard are analyzed and controlled under a relative error of 6 × 10−6 after 10-times iterative calibration. The dimension properties of the standard are measured and analyzed by a calibrated metrological atom force microscope (AFM) with large range. The experimental results show the grating standard has a good uniformity and structural periodicity. Hence, the laser-focused Cr atomic deposition grating can work as a reference standard.

•A novel concept of acousto-optic ring modulator on silicon-on-insulator technology is presented.•A design is introduced to make SOI waveguide piezoelectric by putting ZnO on SOI layer.•The resonance wavelength of the ring resonator with a radius of 50 μm shifts 22.7% of FSR by SAW modulation.In this paper, a ring frequency shifter using surface acoustic waves (SAW) is developed on a silicon-on-insulator (SOI) technology, in which, a design is introduced to make SOI waveguide piezoelectric by putting ZnO on SOI layer. A simulation shows that the refractive index change of SOI waveguide with an overlayer of ZnO is about 10−3 by SAW of 100 mW. A finite-difference time domain (FDTD) is used to model the new concept of a ring frequency shifter using SAW of 100 mW. The results show that the resonance wavelength of a ring resonator with a radius of 50 μm shifts 22.7% of a free spectral range (FSR) due to the refractive index change of waveguide by SAW without change in transmission on resonances and finesse, a tiny change in bandwidth, Q-factor and FSR of a ring resonator.

•A detailed analysis about the deviation is developed about the deviation by Laser Focus Sensor.•A secondary coating technology is introduced to improve the measurement accuracy of the LFS.•The experiments are performed to validate the method.This paper presents a detailed discussion about the measurement deviation of Laser Focus Sensor (LFS) for the measurement of the nano dimension standard sample. A new method is developed to improve the measurement accuracy of the LFS in the nano dimension standard. The experimental results show that the secondary coating technology by sputtering Cu atomic on the nano dimension standard sample can improve the measurement accuracy of the LFS.

We discuss the design parameters to present the effect similar to electromagnetically induced transparency (EIT) in the two micro-resonators system. A design model, specifically suited for the EIT in the two resonators system, is developed. An experiment is performed to validate the design model.Highlights► The effect similar to the EIT in the two optical resonators system is discussed. ► One design model is developed for the EIT in the two optical resonators system. ► An experiment is performed to validate the design model.

In this work we present a new theoretical treatment for the design of two resonator system. Our finding shows our model behaves better than previous models when we consider side-coupling loss for two resonators coupled in a ring configuration. In addition, our model is more physical and intuitive for the analysis of the two resonators system. The properties of the system are studied using the model. The optimum separation between the resonators for the parallel-coupled resonators is provided and the effect of the side-coupling on the system is presented.Highlights► One optimum design model about the two resonators system is presented. ► When we consider side-coupling loss in the system, only our model can work, other models are invalid. ► Our model is more physical and intuitive for the analysis of the two resonators system.

A numerical design model is presented for the polymer waveguide in an electro-optic modulator. The effective index method is used to analyze the height of the core waveguide and rib waveguide, an improved Marcatili method is presented to design the rib waveguide width in order to keep the strong single mode operation and have a good match with the standard fiber. Also, the thickness of the upper cladding layer is discussed through calculating the effective index of the multilayer planar waveguide structure has been obtained by setting the optical loss due to the metallic absorption to an acceptable value (<0.1 dB/cm). As a consequence, we take the EO polymer waveguide structure of UV15:CLD/APC:UFC170 as an example, an optimized design is reported.Highlights► One numerical design model for the polymer waveguide is presented. ► An improved Marcatili method is presented to design the rib waveguide. ► Calculation of the multilayer planar waveguide structure has been presented.